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Brookhaven Science Associates, LLC (BSA), under a Prime Contract for the operation of Brookhaven National Laboratory (BNL) with the U.S. Department of Energy (DOE), herewith solicits your proposal to furnish a Silicon Deep Reactive Ion Etch Reactor (SiDRIE).

The Center for Functional Nanomaterials (CFN) is a user-oriented research center whose mission is to be an open facility for the nanoscience research community and advance the science of nanomaterials that addresses the nations’ energy challenge. Research at CFN focuses on the development and application of advanced techniques to understand structure-processing-property relationships in functional nanomaterials. New and unique capabilities would enrich both internal research and our User program.

BSA is planning the procurement of silicon deep reactive ion etch reactor (SiDRIE) with single wafer semi-automatic transfer chamber for the Center for Integrated Nanotechnologies (CINT) at Sandia National Laboratories (SNL). The SiDRIE will be procured by Brookhaven Science Associates (BSA) on behalf of the CINT as part of the Nanoscale Science Research Center Recapitalization (NSRC-Recap) project. The SiDRIE reactor supports microfabrication efforts for highly selective, precision etching of single crystal silicon and Silicon On Insulator (SOI) materials for the development of Mid-Infrared Photonics, MEMS and other advanced material research activities. Dual purpose Si etch capability, providing both high speed time- multiplexed, high aspect ratio/through wafer etch and plasma dicing, and also shallow etching of crystalline silicon structures in the sub-micron region with high precision. The new system will include a single 100-200mm transfer chamber, a heated reaction chamber that includes a high power inductively coupled plasma unit, a heated/CW and Pulsed LF biasing electrode with associated gas delivery, vacuum and cooling systems, optical emissions spectrometry and laser interferometry.

BSA invites you to participate in accordance with the RFP letter and all supporting attachments. This requirement has been posted on the sam.gov website under Request for Proposals (RFP) 419159. The response due date is December 21, 2022 at 4:30 PM Eastern Time. Any questions concerning this RFP must be addressed via email to the attention of Maile Nichols at mnichols@bnl.gov.

The purpose of this Amendment 01 is to (1) provide all offerors with an answer to a question received in response to the solicitation (see below), (2) update the RFP document to include the requirement for offerors to complete the Contract-Specific Safety Template and submit as part of the proposal package, and (3) provide the complete DRAFT subcontract package to include Attachment 4, SNL Site-Specific Terms and Conditions, and Attachment 5, Hazard Assessment SiDRIE.

The proposal due date and remainder of the solicitation remain unchanged.

Question: Offeror intends to propose a commercial item in response to this solicitation. As such, offeror would like clarification if commercial terms and conditions may be proposed.

Answer: Pursuant with Section 4.3.2, Tab B: Draft Contract with Terms and Conditions, of the RFP, “The Offeror shall clearly note its acceptance in full. Any exceptions shall be noted by redlining the draft Terms and Conditions document with “tracked changes” turned ON, however, the Offeror shall not construe noted exceptions, if any, to be accepted by BSA. The Offeror will be required to execute a Contract in accordance with the provisions of the Draft Contract.” Based on the preceding, the Offeror may propose alternative terms and conditions (for example, propose that BSA use its commercial terms and conditions if proposing a commercial item).